ECRI Microelectronics

Research on Key Process Technology in LTCC Substrate Fabrication

Abstract: Low temperature co-fired multilayer ceramic(LTCC) technology is an important way to realize the miniaturization, integration and high reliability of components, especially in the aerospace field. In view of the high quality grade requirements applied in the aerospace industry, this paper mainly introduces the key process technology analysis and control of the LTCC substrate in the manufacturing process

Key Words: LTCC, shrinkage, precision

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